We design and produce monolithic stages for ultra-fine resolution. The stages are suitable for UHV and angular resolution as low as 0.01 arcsec (50 nrad). The stages are produced to match customer requirements for resolution, size, and load.

JJ X-Ray has developed theta rotation and a chi rotation based on a stainless steel monolithic stage. The central part of the monolithic stage is rotated relative to the exterior part via thin-walled connections. To increase the resolution, the piezo actuator acts on a flexible lever arm that reduces the resolution by a factor of 4. The angular range of the stages is 1 mrad, and the load capacity is 1-10 kg.