Technical specifications
Aperture size
Maximum: 80 mm x 80 mm
Minimum: Full overlap
Resolution
1 micron per full step
Repeatability
< 2 micron
Accuracy
± 10 microns over the full range
± 1 micron or better with encoders
Vacuum
O-ring sealed, high vacuum 10-5 mbar, low outgassing materials
Limit switches (end-of-travel)
Included as standard on all motions
Guiding
High precision internal rails and carriages
Electrical connections
Limit switches coupled to 2 motor connectors (SUB-D 15 pins male)
Motors
2-phase stepping motors
Mechanical dimensions
341 mm x 341 mm x 118 mm
268 mm x 268 mm x 114 mm (housing only)
Mechanical connections
M6-threaded holes on the sides, as shown on the drawing. LF-160 flange connections are provided on the body of both sides of the slit
Weight
≈ 12.0 kg
Outer surface
Anodized aluminum in color nature
Common options
Blades: Various blade shapes and materials
Motors: Custom high-resolution stepping, including IMS motors
Encoders: Back-axle rotary encoders or internal linear encoders (absolute or incremental)
Adaptors: Other KF(NW) flanges or CF flanges
Special preparation for enabling vacuum <10-6 mbar
Internal wiring of Kapton or wiring with Teflon insulation
Actively cooled version (50W per blade)
A slim version is available (reduced length in beam direction: 99 mm instead of 114 mm).
Custom connectors
Technical drawings
Wiring and connectors
Manuals
3D
