IB-C180-HV is the largest standard slit system in our product range. It is based on a modified version of our IB-C80-HV. Similar to our other vacuum slit systems it is guaranteed to operate smoothly down to 1E-5 mbar.
It features four individually movable blades providing a large 180 mm x 180 mm aperture. Special care has been taken to insure that the forces generated by the vacuum do not adversely affect the operation and precision of the blade motion.
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|Key Facts of IB-C180-HV|
|Aperture size||Maximum: 180 mm x 180 mm
Minimum: -5 mm x -5 mm
|Resolution||2.5 µm per full step
1µm mechanical resolution
|Accuracy||5 micron over full range with internal linear encoders|
|Vacuum||O-ring sealed, high vacuum 10-5 mbar, low outgassing materials|
|Mechanical dimension||430 mm x 430 mm x 117 mm (housing only)
504 mm x 504 mm x 117 mm (with motors)
|Common options||Blade options: 2, 4, 5, 10 or 20 mm.
Motors: Custom high resolution stepping motors, including IMS motors
Encoders: Back-axle rotary encoders or internal Renishaw linear encoders
Connectors: Adaptors to other flanges can be provided
Special preparation for enabling vacuum <10-6 mbar Internal wiring of Kapton or wiring with Teflon insulation